As filed with the Securities and Exchange Commission on February 11, 2003
                                                   Registration No. 333-________

                       SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                                    FORM S-8
                          REGISTRATION STATEMENT UNDER
                           THE SECURITIES ACT OF 1933

                              AMTECH SYSTEMS, INC.
             (Exact name of registrant as specified in its charter)

               Arizona                                            86-0411215
    (State or other jurisdiction of                           (I.R.S. Employer
     incorporation or organization)                          Identification No.)

 131 South Clark Drive, Tempe, Arizona                               85281
(Address of Principal Executive offices)                          (Zip Code)

                             1998 Stock Option Plan
                            (Full title of the plan)

                                 Robert T. Hass
                              Amtech Systems, Inc.
                              131 South Clark Drive
                              Tempe, Arizona 85281
                     (Name and address of agent for service)

                                 (480) 967-5146
         (Telephone number, including area code, of agent for service)

                                  With copy to:

                              Gregory R. Hall, Esq.
                        Squire, Sanders & Dempsey L.L.P.
                       40 North Central Avenue, Suite 2700
                             Phoenix, Arizona 85004
                                 (602) 528-4000

                                                                     Page 1 of 8
                                                         Exhibit Index on Page 8

                         CALCULATION OF REGISTRATION FEE



========================================================================================
                                                PROPOSED       PROPOSED
       TITLE OF                                  MAXIMUM        MAXIMUM
      SECURITIES                   AMOUNT       OFFERING       AGGREGATE      AMOUNT OF
         TO BE                     TO BE          PRICE        OFFERING     REGISTRATION
      REGISTERED                 REGISTERED    PER SHARE(1)     PRICE(1)         FEE
----------------------------------------------------------------------------------------
                                                                
Common Stock, $.01 par value     200,000(1)      $3.02(2)      $604,000(1)     $55.57
========================================================================================


(1)  This  Registration  Statement also covers such additional  shares of Common
     Stock as may be  issuable  pursuant  to  adjustments  deemed  necessary  or
     equitable by the Board of Directors of the  Registrant  upon stock  splits,
     stock dividends, or other similar changes in capitalization, as provided in
     the 1998 Stock Option Plan.

(2)  Estimated  solely for the purpose of determining  the  registration  fee in
     accordance  with Rules 457(c) and 457(h) of the  Securities Act of 1933, on
     the basis of the  average  of the high and low  prices for shares of Common
     Stock on February 6, 2003, as reported on the Nasdaq SmallCap Market.

This Registration  Statement also relates to the Form S-8 Registration Statement
No.  333-46086,  the  contents  of which are  incorporated  herein by  reference
pursuant to General Instruction E to Form S-8. Under such Registration Statement
the Registrant  registered  50,000 shares of common stock for issuance under the
Amtech Systems, Inc. 1998 Stock Option Plan.

This Registration  Statement shall become effective  automatically upon the date
of filing in  accordance  with Section 8(a) of the  Securities  Act of 1933,  as
amended.

                                       2

                                     PART I

              INFORMATION REQUIRED IN THE SECTION 10(A) PROSPECTUS

     The documents  containing the information  specified in Part I, Items 1 and
2, will be delivered to employees in accordance with Form S-8 and Securities Act
Rule 428.

                                     PART II

               INFORMATION REQUIRED IN THE REGISTRATION STATEMENT

Item 3. INCORPORATION OF CERTAIN DOCUMENTS BY REFERENCE.

     The following  documents  are hereby  incorporated  by reference  into this
Registration Statement and shall be deemed a part hereof:

     (a) the Annual Report of Amtech Systems,  Inc.  ("Amtech") on Form 10-K for
the fiscal year ended  September  30,  2002,  as amended by Form 10-K/A filed on
February 11, 2003;

     (b) all reports filed by Amtech with the Securities and Exchange Commission
pursuant to Section 13(a) or 15(d) of the  Securities  Exchange Act of 1934 (the
"Exchange Act") subsequent to September 30, 2002; and

     (c)  the  description  of  Amtech's  common  stock  contained  in  Amtech's
registration statement filed pursuant to Section 12 of the Exchange Act.

     All  documents  subsequently  filed by Amtech  pursuant to Sections  13(a),
13(c),  14 or 15(d) of the Exchange Act,  after the date hereof and prior to the
filing  of a  post-effective  amendment  to this  Registration  Statement  which
indicates that all securities  offered have been sold or which  deregisters  all
securities  then  remaining  unsold,  shall  be  deemed  to be  incorporated  by
reference in this  Registration  Statement and to be a part hereof from the date
of filing such documents.

Item 4. DESCRIPTION OF SECURITIES. Not applicable.

Item 5. INTERESTS OF NAMED EXPERTS AND COUNSEL. Not applicable.

Item 6. INDEMNIFICATION OF DIRECTORS AND OFFICERS.

     Pursuant to Amtech's Articles of Incorporation,  it shall indemnify any and
all of its  existing  and  former  directors,  officers,  employees,  and agents
against  all  expenses  incurred  by them and each of them,  including,  but not
limited to legal fees, judgments,  penalties,  and amounts paid in settlement or
compromise,  which may arise or be  incurred,  rendered,  or levied in any legal
action brought or threatened against any of them for or on account of any action
or omission  alleged to have been  committed  while  acting  within the scope of
employment as director,  officer, employee or agent of the corporation,  whether
or not any  action is or has been  filed  against  them and  whether  or not any

                                       3

settlement or compromise is approved by a court,  indemnification  shall be made
by the  corporation  whether the legal action  brought or threatened is by or in
the right of the  corporation  or by any other person.  Whenever any existing or
former director,  officer,  employee,  or agent shall report to the President of
the  corporation  or the chairman of the Board of  Directors  that he or she has
incurred or may incur  expenses,  including,  but not  limited  to,  legal fees,
judgments,  penalties,  and amounts paid in  settlement or compromise in a legal
action brought or threatened  against him or her for or on account of any action
or omission alleged to have been committed by him or her while acting within the
scope of his or her employment as a director,  officer, employee or agent of the
corporation,  the Board of Directors  shall, at its next regular or at a special
meeting  held within a  reasonable  time  thereafter,  determine  in good faith,
whether in regard to the matter involved in the action or  contemplated  action,
such  person  acted,  failed to act, or refused to act  willfully  or with gross
negligence  or with  fraudulent  or criminal  intent.  If the Board of Directors
determines,  in good faith, that such person did not act, fail to act, or refuse
to act willfully or with gross negligence or with fraudulent or criminal intent,
in regard to the matter  involved  in the action or  contemplated  action,  such
person  acted,  failed  to act,  or  refused  to act  willfully  or  with  gross
negligence  or  with  fraudulent  criminal  intent,   indemnification  shall  be
mandatory and shall be  automatically  extended as specified  herein;  provided,
that the  corporation  shall  have the  right to refuse  indemnification  in any
instance in which the person to whom  indemnification  would otherwise have been
applicable shall have unreasonably refused to permit the corporation, at its own
expense and  through  counsel of its own  choosing,  to defend him or her in the
action.

     Insofar as indemnification for liabilities arising under the Securities Act
of 1933 may be permitted to directors,  officers or persons  controlling  Amtech
pursuant  to the  foregoing  provision,  Amtech  has been  informed  that in the
opinion of the  Securities  and  Exchange  Commission  such  indemnification  is
against public policy as expressed in such Act and is therefore unenforceable.

Item 7. EXEMPTION FROM REGISTRATION CLAIMED. Not applicable.

Item 8. EXHIBITS.

     EXHIBIT
      NUMBER                    DESCRIPTION
      ------                    -----------

        4      1998 Stock Option Plan (as amended March 29, 2002)

        5      Form of opinion rendered by Squire, Sanders & Dempsey L.L.P
               (including consent)

       23.1    Consent of KPMG LLP

       23.2    Consent of Counsel (see Exhibit 5)

        24     Powers of Attorney

                                       4

Item 9. UNDERTAKINGS.

     (a) The undersigned Registrant hereby undertakes:

          (1) To file,  during  any  period  in which  offers or sales are being
made, a post-effective amendment to this registration statement:

               (i) To include any prospectus required by Section 10(a)(3) of the
          Securities Act of 1933;

               (ii) To reflect  in the  prospectus  any facts or events  arising
          after the effective  date of the  registration  statement (or the most
          recent post-effective amendment thereof) which, individually or in the
          aggregate, represent a fundamental change in the information set forth
          in the  registration  statement  Notwithstanding  the  foregoing,  any
          increase  or decrease  in volume of  securities  offered (if the total
          dollar  value of  securities  offered  would not exceed that which was
          registered)  and  any  deviation  from  the  low  or  high  end of the
          estimated  maximum  offering  range  may be  reflected  in the form of
          prospectus  filed with the  Commission  pursuant to Rule 424(b) if, in
          the aggregate,  the changes in volume and price represent no more than
          20 percent change in the maximum aggregate offering price set forth in
          the   "Calculation  of  Registration   Fee"  table  in  the  effective
          registration statement;

               (iii) To include any  material  information  with  respect to the
          plan of  distribution  not  previously  disclosed in the  registration
          statement  or  any  material   change  to  such   information  in  the
          registration statement;

PROVIDED,  HOWEVER, that paragraphs (a)(1)(i) and (a)(1)(ii) do not apply if the
registration  statement is on Form S-3 or Form S-8, and the information required
to be included in a post-effective amendment by those paragraphs is contained in
periodic reports filed by the Registrant pursuant to Section 13 or Section 15(d)
of the Securities Exchange Act of 1934 that are incorporated by reference in the
registration statement.

          (2) That,  for the  purpose of  determining  any  liability  under the
Securities Act of 1933, each such post-effective amendment shall be deemed to be
a new registration statement relating to the securities offered therein, and the
offering of such  securities at that time shall be deemed to be the initial BONA
FIDE offering thereof.

          (3) To remove from registration by means of a post-effective amendment
any of the securities being registered which remain unsold at the termination of
the offering.

     (b) The  undersigned  Registrant  hereby  undertakes  that, for purposes of
determining  any liability  under the Securities Act of 1933, each filing of the
Registrant's  annual  report  pursuant to Section  13(a) or Section 15(d) of the
Securities  Exchange  Act of 1934  (and,  where  applicable,  each  filing of an
employee  benefit  plan's  annual  report  pursuant  to  Section  15(d)  of  the
Securities  Exchange  Act of 1934)  that is  incorporated  by  reference  in the
registration  statement  shall  be  deemed  to be a new  registration  statement
relating to the securities offered therein,  and the offering of such securities
at that time shall be deemed to be the initial BONA FIDE offering thereof.

                                       5

     (c) Insofar as indemnification for liabilities arising under the Securities
Act of 1933 may be permitted to directors,  officers and controlling  persons of
the  Registrant  pursuant  to  the  foregoing  provisions,   or  otherwise,  the
Registrant  has been advised that in the opinion of the  Securities and Exchange
Commission such indemnification is against public policy as expressed in the Act
and is, therefore,  unenforceable. In the event that a claim for indemnification
against such  liabilities  (other than the payment by the Registrant of expenses
incurred or paid by a director,  officer or controlling person of the Registrant
in the successful defense of any action, suit or proceeding) is asserted by such
director,  officer or controlling person in connection with the securities being
registered, the Registrant will, unless in the opinion of its counsel the matter
has been  settled by  controlling  precedent,  submit to a court of  appropriate
jurisdiction  the  question  of whether  such  indemnification  by it is against
public  policy  as  expressed  in the Act  and  will be  governed  by the  final
adjudication of such issue.

                                       6

                                   SIGNATURES

     Pursuant to the  requirements of the Securities Act of 1933, the Registrant
certifies  that it has  reasonable  grounds to believe  that it meets all of the
requirements  for  filing  on Form S-8 and has  duly  caused  this  Registration
Statement  to be  signed  on its  behalf  by  the  undersigned,  thereunto  duly
authorized,  in the  City of  Tempe,  State  of  Arizona,  on this  11th  day of
February, 2003.

                                        AMTECH SYSTEMS, INC.,
                                        an Arizona corporation

                                        By /s/ Jong S. Whang
                                           -------------------------------------
                                           Jong S. Whang, President
                                           (Principal Executive Officer)

     Pursuant  to  the   requirements  of  the  Securities  Act  of  1933,  this
Registration  Statement  has been signed below by the  following  persons in the
capacities and on the date indicated.

SIGNATURE                               TITLE                        DATE
---------                               -----                        ----

                             Chairman of the Board,            February 11, 2003
/s/ Jong S. Whang            President and Chief Executive
-----------------------      Officer (Chief Executive
Jong S. Whang                Officer)

/s/ Robert T. Hass           Vice President-Finance,           February 11, 2003
-----------------------      Chief Financial Officer,
Robert T. Hass               Secretary and Treasurer
                             (Chief Financial & Accounting
                             Officer) and Director

/s/ *                        Director                          February 11, 2003
-----------------------
Alvin Katz

/s/ *                        Director                          February 11, 2003
-----------------------
Bruce R. Thaw

*/s/ Robert T. Hass          Director                          February 11, 2003
-----------------------
Robert T. Hass
Attorney-in-Fact

                                       7

                                  EXHIBIT INDEX

EXHIBIT                                                             PAGE OR
NUMBER                     DESCRIPTION                         METHOD OF FILING
------                     -----------                         ----------------

  4       1998 Stock Option Plan (as amended March 29, 2002)           *

  5       Form of opinion rendered by Squire, Sanders
          & Dempsey L.L.P (including consent)                          *

23.1      Consent of KPMG LLP                                          *

23.2      Consent of Counsel                                     See Exhibit 5

 24       Powers of Attorney                                  See Signature Page

----------
* Filed herewith.

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